Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

Koichiro Iwasa; Tetsuhiko Isobe; Mamoru Senna

doi:10.1016/s0167-2738(97)00231-2

Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

Koichiro Iwasa, Tetsuhiko Isobe, Mamoru Senna

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In₂O₃ 95/SnO₂ 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO₂ above 1200 °C.

Original language	English
Pages (from-to)	71-78
Number of pages	8
Journal	Solid State Ionics
Volume	101-103
Issue number	PART 1
DOIs	https://doi.org/10.1016/s0167-2738(97)00231-2
Publication status	Published - 1997 Nov

Keywords

Sputter target
Surface reaction layer
Wet grinding

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)
Condensed Matter Physics

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10.1016/s0167-2738(97)00231-2

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@article{75ffae7231a84321b43c2d3a3492ed39,

title = "Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing",

abstract = "Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 °C.",

keywords = "Sputter target, Surface reaction layer, Wet grinding",

author = "Koichiro Iwasa and Tetsuhiko Isobe and Mamoru Senna",

year = "1997",

month = nov,

doi = "10.1016/s0167-2738(97)00231-2",

language = "English",

volume = "101-103",

pages = "71--78",

journal = "Solid State Ionics",

issn = "0167-2738",

publisher = "Elsevier",

number = "PART 1",

}

TY - JOUR

T1 - Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

AU - Iwasa, Koichiro

AU - Isobe, Tetsuhiko

AU - Senna, Mamoru

PY - 1997/11

Y1 - 1997/11

N2 - Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 °C.

AB - Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 °C.

KW - Sputter target

KW - Surface reaction layer

KW - Wet grinding

UR - http://www.scopus.com/inward/record.url?scp=4244162756&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4244162756&partnerID=8YFLogxK

U2 - 10.1016/s0167-2738(97)00231-2

DO - 10.1016/s0167-2738(97)00231-2

M3 - Article

AN - SCOPUS:4244162756

SN - 0167-2738

VL - 101-103

SP - 71

EP - 78

JO - Solid State Ionics

JF - Solid State Ionics

IS - PART 1

ER -

Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

Abstract

Keywords

ASJC Scopus subject areas

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