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Experimental evaluation of coulomb-scattering-limited inversion-layer mobility of n-type metal-oxide-semiconductor field-effect transistors on Si(100), (110), and (111)-surfaces: Impact of correlation between conductivity mass and normal mass

  • Yukio Nakabayashi
  • , Takamitsu Ishihara
  • , Toshinori Numata
  • , Ken Uchida
  • , Shinichi Takagi

Research output: Contribution to journal › Article › peer-review

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