Experimental research on a modular miniaturization nanoindentation device

Hu Huang, Hongwei Zhao, Jie Mi, Jie Yang, Shunguang Wan, Zhaojun Yang, Jiwang Yan, Zhichao Ma, Chunyang Geng

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)


Nanoindentation technology is developing toward the in situ test which requires miniaturization of indentation instruments. This paper presents a miniaturization nanoindentation device based on the modular idea. It mainly consists of macro-adjusting mechanism, x-y precise positioning platform, z axis precise driving unit, and the load-depth measuring unit. The device can be assembled with different forms and has minimum dimensions of 200 mm × 135 mm × 200 mm. The load resolution is about 0.1 mN and the displacement resolution is about 10 nm. A new calibration method named the reference-mapping method is proposed to calibrate the developed device. Output performance tests and indentation experiments indicate the feasibility of the developed device and calibration method. This paper gives an example that combining piezoelectric actuators with flexure hinge to realize nanoindentation tests. Integrating a smaller displacement sensor, a more compact nanoindentation device can be designed in the future.

Original languageEnglish
Article number095101
JournalReview of Scientific Instruments
Issue number9
Publication statusPublished - 2011 Sept
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation


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