TY - JOUR
T1 - Experimental Study of Very-High-Frequency Plasmas in H2 by Spatiotemporally Resolved Optical Emission Spectroscopy
AU - Kakuta, Shigeru
AU - Kitajima, Takeshi
AU - Okabe, Yutaka
AU - Makabe, Toshiaki
PY - 1994/7
Y1 - 1994/7
N2 - A very-high-frequency (VHF) plasma at 100 MHz is experimentally investigated in parallel-plate configuration in H2 using spatiotemporal optical emission spectroscopy and current-voltage-power waveforms. The observed optical emission intensity and net excitation rate profiles have strong temporal and spatial variations. The VHF plasma is still capacitive, and is maintained by reflected electrons in the oscillating sheath next to the instantaneous cathode. The characteristics of VHF plasmas, that the excitation rate increases in proportion to the square of driving frequency, and that the minimum sustaining voltage and pressure decrease with increasing frequency, are experimentally confirmed at pressures, ranging from 0.01 to 2 Torr and at the frequency of 100 MHz.
AB - A very-high-frequency (VHF) plasma at 100 MHz is experimentally investigated in parallel-plate configuration in H2 using spatiotemporal optical emission spectroscopy and current-voltage-power waveforms. The observed optical emission intensity and net excitation rate profiles have strong temporal and spatial variations. The VHF plasma is still capacitive, and is maintained by reflected electrons in the oscillating sheath next to the instantaneous cathode. The characteristics of VHF plasmas, that the excitation rate increases in proportion to the square of driving frequency, and that the minimum sustaining voltage and pressure decrease with increasing frequency, are experimentally confirmed at pressures, ranging from 0.01 to 2 Torr and at the frequency of 100 MHz.
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U2 - 10.1143/JJAP.33.4335
DO - 10.1143/JJAP.33.4335
M3 - Article
AN - SCOPUS:0028460612
SN - 0021-4922
VL - 33
SP - 4335
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - 7S
ER -