TY - JOUR
T1 - Far-field and near-field optical readings of under-50 nm-sized pits
AU - Hosaka, Sumio
AU - Shintani, Toshimichi
AU - Koyanagi, Hajime
AU - Katoh, Keizo
AU - Nishida, Tetsuya
AU - Saiki, Toshiharu
AU - Hasegawa, Tsuyoshi
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2002/8/1
Y1 - 2002/8/1
N2 - In this study, we investigated the limitations of optical reading of very fine pits using conventional optics, immersion lens optics and near-field optics. Using very fine pits < 100 nm in size formed by electron beam writing, a reflection-type depolarization scanning near-field optical microscope (SNOM) read very fine pits < 50nm in size. On the other hand, far-field optics read fine pits only > 160 nm in size using a lens with a numerical aperture (NA) of 0.95 (17 Gb/in2). In addition, an oil immersion lens optics with a NA of 1.4 read fine pits only 100 nm in size (45 Gb/in2). Advanced near-field optics is a promising tool for achieving ultrahigh-density optical reading of trillion bits/in2.
AB - In this study, we investigated the limitations of optical reading of very fine pits using conventional optics, immersion lens optics and near-field optics. Using very fine pits < 100 nm in size formed by electron beam writing, a reflection-type depolarization scanning near-field optical microscope (SNOM) read very fine pits < 50nm in size. On the other hand, far-field optics read fine pits only > 160 nm in size using a lens with a numerical aperture (NA) of 0.95 (17 Gb/in2). In addition, an oil immersion lens optics with a NA of 1.4 read fine pits only 100 nm in size (45 Gb/in2). Advanced near-field optics is a promising tool for achieving ultrahigh-density optical reading of trillion bits/in2.
KW - Depolarization
KW - Near-field optical reading
KW - Near-field optics
KW - SIL
KW - SNOM
KW - Tera-bit storage
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U2 - 10.1143/jjap.41.l884
DO - 10.1143/jjap.41.l884
M3 - Article
AN - SCOPUS:0036695367
SN - 0021-4922
VL - 41
SP - L884-L886
JO - Japanese Journal of Applied Physics, Part 2: Letters
JF - Japanese Journal of Applied Physics, Part 2: Letters
IS - 8 A
ER -