Flexible distributed capacitive sensor with encapsulated ferroelectric liquid

Y. Hotta; Y. Zhang; N. Miki

doi:10.1109/MEMSYS.2011.5734489

Flexible distributed capacitive sensor with encapsulated ferroelectric liquid

Y. Hotta, Y. Zhang, N. Miki

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

We demonstrate flexible and highly sensitive capacitive sensor arrays that encapsulate DI water as dielectric. DI water, which is a ferroelectric liquid and has a relative dielectric constant of approximately 80, could increase the capacitance of the sensor and enhance the sensitivity while maintaining flexibility of the sensor with electrodes patterned on flexible PDMS substrates. The proposed sensor was microfabricated and demonstrated successfully 40 times greater sensitivity than sensors without DI water. Since DI water is incompressible fluid, it restricted the displacements of the electrodes. We designed a reservoir of DI water where the DI water between the electrodes could escape, which allowed more deformation of the PDMS substrates and successfully augmented the sensitivity of the proposed sensor.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	573-576
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734489
Publication status	Published - 2011 Apr 13
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 2011 Jan 23 → 2011 Jan 27

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	11/1/23 → 11/1/27

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2011.5734489

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Hotta, Y., Zhang, Y., & Miki, N. (2011). Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 573-576). Article 5734489 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734489

Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. / Hotta, Y.; Zhang, Y.; Miki, N.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 573-576 5734489 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hotta, Y, Zhang, Y & Miki, N 2011, Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734489, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 573-576, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734489

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Flexible distributed capacitive sensor with encapsulated ferroelectric liquid

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