Fluid jet and bonnet polishing of optical moulds for applications from visible to X-Ray

A. Beaucamp, R. Freeman, A. Matsumoto, Y. Namba

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Electroless Nickel (ENi) and binderless Tungsten Carbide (WC) are widely used to make replication moulds for optics ranging from consumer camera lenses to high-accuracy X-ray mirrors. Aspheric shape generation is generally performed by diamond turning in the case of Nickel, and micro-grinding in the case of Tungsten Carbide. Both machining methods fail in general to meet the ultra-precision criteria required by an increasing number of applications. A 7-axis CNC machine equipped with sub-aperture fluid jet and precessed bonnet polishing technology was used to develop deterministic finishing processes on both Electroless Nickel and Tungsten Carbide. Corrective polishing to less than λ/20 (<31nm PV) form error can be achieved, as well as the ability to smooth surface texture down to 1nm Ra or less.

Original languageEnglish
Title of host publicationProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
EditorsP. Shore, Henny Spaan, Theresa Burke, H. Van Brussel
Publishereuspen
Pages29-32
Number of pages4
ISBN (Electronic)9780955308291
Publication statusPublished - 2011
Externally publishedYes
Event11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 - Como, Italy
Duration: 2011 May 232011 May 26

Publication series

NameProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Volume1

Other

Other11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Country/TerritoryItaly
CityComo
Period11/5/2311/5/26

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • General Materials Science
  • Instrumentation
  • Environmental Engineering

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