Force controller design based on PQ method for dual-stage actuators in polishing machines

Kenta Seki; Yusaku Shinohara; Makoto Iwasaki; Hiroshi Chinda; Masaki Takahashi

doi:10.1109/IECON.2011.6119856

Force controller design based on PQ method for dual-stage actuators in polishing machines

Kenta Seki, Yusaku Shinohara, Makoto Iwasaki, Hiroshi Chinda, Masaki Takahashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper presents a controller design approach to realize a precise force control of load devices in polishing machines. In the load device, a pneumatic actuator and a voice coil motor are combined as dual-stage actuators to expand the servo bandwidth. However, the interference between the dual actuators may deteriorate the servo performance, especially at around the cross-over frequency. In this paper, therefore, PQ method is adopted to achieve the high precision force control by the expansion of servo bandwidth, where the compensators are especially designed to suppress the interference. The proposed approach has been verified by experiments using an actual load device of the polishing machine.

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society
Pages	3388-3393
Number of pages	6
DOIs	https://doi.org/10.1109/IECON.2011.6119856
Publication status	Published - 2011 Dec 1
Externally published	Yes
Event	37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 - Melbourne, VIC, Australia Duration: 2011 Nov 7 → 2011 Nov 10

Publication series

Name	IECON Proceedings (Industrial Electronics Conference)

Other

Other	37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011
Country/Territory	Australia
City	Melbourne, VIC
Period	11/11/7 → 11/11/10

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/IECON.2011.6119856

Cite this

Seki, K., Shinohara, Y., Iwasaki, M., Chinda, H., & Takahashi, M. (2011). Force controller design based on PQ method for dual-stage actuators in polishing machines. In Proceedings: IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society (pp. 3388-3393). Article 6119856 (IECON Proceedings (Industrial Electronics Conference)). https://doi.org/10.1109/IECON.2011.6119856

Force controller design based on PQ method for dual-stage actuators in polishing machines. / Seki, Kenta; Shinohara, Yusaku; Iwasaki, Makoto et al.
Proceedings: IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society. 2011. p. 3388-3393 6119856 (IECON Proceedings (Industrial Electronics Conference)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Seki, K, Shinohara, Y, Iwasaki, M, Chinda, H & Takahashi, M 2011, Force controller design based on PQ method for dual-stage actuators in polishing machines. in Proceedings: IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society., 6119856, IECON Proceedings (Industrial Electronics Conference), pp. 3388-3393, 37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011, Melbourne, VIC, Australia, 11/11/7. https://doi.org/10.1109/IECON.2011.6119856

@inproceedings{48a189e127ae4818a453f679e5428495,

title = "Force controller design based on PQ method for dual-stage actuators in polishing machines",

abstract = "This paper presents a controller design approach to realize a precise force control of load devices in polishing machines. In the load device, a pneumatic actuator and a voice coil motor are combined as dual-stage actuators to expand the servo bandwidth. However, the interference between the dual actuators may deteriorate the servo performance, especially at around the cross-over frequency. In this paper, therefore, PQ method is adopted to achieve the high precision force control by the expansion of servo bandwidth, where the compensators are especially designed to suppress the interference. The proposed approach has been verified by experiments using an actual load device of the polishing machine.",

author = "Kenta Seki and Yusaku Shinohara and Makoto Iwasaki and Hiroshi Chinda and Masaki Takahashi",

year = "2011",

month = dec,

day = "1",

doi = "10.1109/IECON.2011.6119856",

language = "English",

isbn = "9781612849720",

series = "IECON Proceedings (Industrial Electronics Conference)",

pages = "3388--3393",

booktitle = "Proceedings",

note = "37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 ; Conference date: 07-11-2011 Through 10-11-2011",

}

TY - GEN

T1 - Force controller design based on PQ method for dual-stage actuators in polishing machines

AU - Seki, Kenta

AU - Shinohara, Yusaku

AU - Iwasaki, Makoto

AU - Chinda, Hiroshi

AU - Takahashi, Masaki

PY - 2011/12/1

Y1 - 2011/12/1

N2 - This paper presents a controller design approach to realize a precise force control of load devices in polishing machines. In the load device, a pneumatic actuator and a voice coil motor are combined as dual-stage actuators to expand the servo bandwidth. However, the interference between the dual actuators may deteriorate the servo performance, especially at around the cross-over frequency. In this paper, therefore, PQ method is adopted to achieve the high precision force control by the expansion of servo bandwidth, where the compensators are especially designed to suppress the interference. The proposed approach has been verified by experiments using an actual load device of the polishing machine.

AB - This paper presents a controller design approach to realize a precise force control of load devices in polishing machines. In the load device, a pneumatic actuator and a voice coil motor are combined as dual-stage actuators to expand the servo bandwidth. However, the interference between the dual actuators may deteriorate the servo performance, especially at around the cross-over frequency. In this paper, therefore, PQ method is adopted to achieve the high precision force control by the expansion of servo bandwidth, where the compensators are especially designed to suppress the interference. The proposed approach has been verified by experiments using an actual load device of the polishing machine.

UR - http://www.scopus.com/inward/record.url?scp=84856551393&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84856551393&partnerID=8YFLogxK

U2 - 10.1109/IECON.2011.6119856

DO - 10.1109/IECON.2011.6119856

M3 - Conference contribution

AN - SCOPUS:84856551393

SN - 9781612849720

T3 - IECON Proceedings (Industrial Electronics Conference)

SP - 3388

EP - 3393

BT - Proceedings

T2 - 37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011

Y2 - 7 November 2011 through 10 November 2011

ER -

Force controller design based on PQ method for dual-stage actuators in polishing machines

Abstract

Publication series

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this