Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method

Shota Sota; Koichiro Handa; Takasumi Tanabe; Yoshinori Uzawa; Kentaro Furusawa; Norihiko Sekine

Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method

Shota Sota
, Koichiro Handa
, Takasumi Tanabe
, Yoshinori Uzawa
, Kentaro Furusawa
, Norihiko Sekine

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

We

Original language	English
Article number	STh2F.5
Journal	Optics InfoBase Conference Papers
Publication status	Published - 2022
Event	CLEO: Science and Innovations, S and I 2022 - San Jose, United States Duration: 2022 May 15 → 2022 May 20

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Cite this

@article{0c891a735fa64e528368f7128fbe918e,

title = "Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method",

abstract = "We",

author = "Shota Sota and Koichiro Handa and Takasumi Tanabe and Yoshinori Uzawa and Kentaro Furusawa and Norihiko Sekine",

note = "Funding Information: We successfully demonstrated frequency comb generation using a SiN-based microresonator fabricated by using the low-temperature HW-CVD method. The intrinsic quality factor as high as 5.4×105 was achieved in the C-band. These results highlight interesting opportunities offered by the HW-CVD method for microcomb device fabrication. A part of this study was supported by JSPS KAKENHI Grant Number JP17K06410. Publisher Copyright: {\textcopyright} Optica Publishing Group 2022, {\textcopyright} 2022 The Author(s); CLEO: Science and Innovations, S and I 2022 ; Conference date: 15-05-2022 Through 20-05-2022",

year = "2022",

language = "English",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

}

TY - JOUR

T1 - Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method

AU - Sota, Shota

AU - Handa, Koichiro

AU - Tanabe, Takasumi

AU - Uzawa, Yoshinori

AU - Furusawa, Kentaro

AU - Sekine, Norihiko

N1 - Funding Information: We successfully demonstrated frequency comb generation using a SiN-based microresonator fabricated by using the low-temperature HW-CVD method. The intrinsic quality factor as high as 5.4×105 was achieved in the C-band. These results highlight interesting opportunities offered by the HW-CVD method for microcomb device fabrication. A part of this study was supported by JSPS KAKENHI Grant Number JP17K06410. Publisher Copyright: © Optica Publishing Group 2022, © 2022 The Author(s)

PY - 2022

Y1 - 2022

N2 - We

AB - We

UR - https://www.scopus.com/pages/publications/85136790547

UR - https://www.scopus.com/pages/publications/85136790547#tab=citedBy

M3 - Conference article

AN - SCOPUS:85136790547

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - STh2F.5

T2 - CLEO: Science and Innovations, S and I 2022

Y2 - 15 May 2022 through 20 May 2022

ER -

Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method

Abstract

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this