Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor

Yuki Kiuchi, Yoshihiro Taguchi, Yuji Nagasaka

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

Original languageEnglish
Pages (from-to)758-767
Number of pages10
JournalOptics Express
Issue number2
Publication statusPublished - 2017 Jan 23

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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