Fused silica microchannel fabrication with smooth surface and high etching selectivity

Kyojiro Morikawa, Po Yin Chen, Hai Linh Tran, Yutaka Kazoe, Chihchen Chen, Takehiko Kitamori

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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Engineering & Materials Science

Chemical Compounds