Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics

Ryo Watanabe; Nguyen Minh-Dung; Hidetoshi Takahashi; Tomoyuki Takahata; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2015.7050924

Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics

Ryo Watanabe, Nguyen Minh-Dung, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.

Original language	English
Article number	7050924
Pages (from-to)	212-214
Number of pages	3
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2015-February
Issue number	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050924
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2015.7050924

Cite this

Watanabe, R., Minh-Dung, N., Takahashi, H., Takahata, T., Matsumoto, K., & Shimoyama, I. (2015). Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015-February(February), 212-214. Article 7050924. https://doi.org/10.1109/MEMSYS.2015.7050924

Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics. / Watanabe, Ryo; Minh-Dung, Nguyen; Takahashi, Hidetoshi et al.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7050924, 26.02.2015, p. 212-214.

Research output: Contribution to journal › Conference article › peer-review

Watanabe, R, Minh-Dung, N, Takahashi, H, Takahata, T, Matsumoto, K & Shimoyama, I 2015, 'Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics', Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2015-February, no. February, 7050924, pp. 212-214. https://doi.org/10.1109/MEMSYS.2015.7050924

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AB - This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.

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Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics

Abstract

ASJC Scopus subject areas

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