Gas barrier properties of carbon films synthesized by atmospheric pressure glow plasma

Hideyuki Kodama; Akira Shirakura; Atsushi Hotta; Tetsuya Suzuki

doi:10.1016/j.surfcoat.2006.01.022

Gas barrier properties of carbon films synthesized by atmospheric pressure glow plasma

Hideyuki Kodama, Akira Shirakura, Atsushi Hotta, Tetsuya Suzuki

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

36 Citations (Scopus)

Abstract

High gas barrier carbon films were successfully synthesized on top of polymer substrates using an atmospheric-pressure glow (APG) plasma CVD equipment by reducing the discharge area and by changing the size of the electrodes of the equipment. Homogeneous and highly stable plasma was constantly generated under an atmosphere of acetylene gas (C₂H₂) without using any other dilution gases such as He, Ar and N₂ that are generally used in order to stabilize the plasma. The absence of the dilution gases led to form rigid carbon-to-carbon bonds. The rigid C bonds constructed dense carbon films at the very surface of the coated films with high gas barrier properties. The oxygen transmission rates of the polyethylene terephthalate (PET) film coated with this amorphous carbon (a-C:H) material was therefore dramatically improved (23 times less in transmission rate) compared with that of an uncoated PET film. The microstructures of the films were investigated by Fourier transform infrared spectroscopy (FT-IR) and the surface morphology was observed by a scanning electron microscope (SEM).

Original language	English
Pages (from-to)	913-917
Number of pages	5
Journal	Surface and Coatings Technology
Volume	201
Issue number	3-4
DOIs	https://doi.org/10.1016/j.surfcoat.2006.01.022
Publication status	Published - 2006 Oct 5

Keywords

APG plasma
Carbon films
Gas barrier
PET

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2006.01.022

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title = "Gas barrier properties of carbon films synthesized by atmospheric pressure glow plasma",

abstract = "High gas barrier carbon films were successfully synthesized on top of polymer substrates using an atmospheric-pressure glow (APG) plasma CVD equipment by reducing the discharge area and by changing the size of the electrodes of the equipment. Homogeneous and highly stable plasma was constantly generated under an atmosphere of acetylene gas (C2H2) without using any other dilution gases such as He, Ar and N2 that are generally used in order to stabilize the plasma. The absence of the dilution gases led to form rigid carbon-to-carbon bonds. The rigid C bonds constructed dense carbon films at the very surface of the coated films with high gas barrier properties. The oxygen transmission rates of the polyethylene terephthalate (PET) film coated with this amorphous carbon (a-C:H) material was therefore dramatically improved (23 times less in transmission rate) compared with that of an uncoated PET film. The microstructures of the films were investigated by Fourier transform infrared spectroscopy (FT-IR) and the surface morphology was observed by a scanning electron microscope (SEM).",

keywords = "APG plasma, Carbon films, Gas barrier, PET",

author = "Hideyuki Kodama and Akira Shirakura and Atsushi Hotta and Tetsuya Suzuki",

note = "Funding Information: This work was partially supported by Grant-in-Aid for the 21st Century COE program KEIO Life Conjugate Chemistry from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.",

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AU - Kodama, Hideyuki

AU - Shirakura, Akira

AU - Hotta, Atsushi

AU - Suzuki, Tetsuya

N1 - Funding Information: This work was partially supported by Grant-in-Aid for the 21st Century COE program KEIO Life Conjugate Chemistry from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.

PY - 2006/10/5

Y1 - 2006/10/5

N2 - High gas barrier carbon films were successfully synthesized on top of polymer substrates using an atmospheric-pressure glow (APG) plasma CVD equipment by reducing the discharge area and by changing the size of the electrodes of the equipment. Homogeneous and highly stable plasma was constantly generated under an atmosphere of acetylene gas (C2H2) without using any other dilution gases such as He, Ar and N2 that are generally used in order to stabilize the plasma. The absence of the dilution gases led to form rigid carbon-to-carbon bonds. The rigid C bonds constructed dense carbon films at the very surface of the coated films with high gas barrier properties. The oxygen transmission rates of the polyethylene terephthalate (PET) film coated with this amorphous carbon (a-C:H) material was therefore dramatically improved (23 times less in transmission rate) compared with that of an uncoated PET film. The microstructures of the films were investigated by Fourier transform infrared spectroscopy (FT-IR) and the surface morphology was observed by a scanning electron microscope (SEM).

AB - High gas barrier carbon films were successfully synthesized on top of polymer substrates using an atmospheric-pressure glow (APG) plasma CVD equipment by reducing the discharge area and by changing the size of the electrodes of the equipment. Homogeneous and highly stable plasma was constantly generated under an atmosphere of acetylene gas (C2H2) without using any other dilution gases such as He, Ar and N2 that are generally used in order to stabilize the plasma. The absence of the dilution gases led to form rigid carbon-to-carbon bonds. The rigid C bonds constructed dense carbon films at the very surface of the coated films with high gas barrier properties. The oxygen transmission rates of the polyethylene terephthalate (PET) film coated with this amorphous carbon (a-C:H) material was therefore dramatically improved (23 times less in transmission rate) compared with that of an uncoated PET film. The microstructures of the films were investigated by Fourier transform infrared spectroscopy (FT-IR) and the surface morphology was observed by a scanning electron microscope (SEM).

KW - APG plasma

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KW - Gas barrier

KW - PET

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Gas barrier properties of carbon films synthesized by atmospheric pressure glow plasma

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