Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas

F. Sato; Y. Sunada; S. Okamoto; F. Kannari

doi:10.1063/1.107543

Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F₂ neutral gas

F. Sato, Y. Sunada, S. Okamoto, F. Kannari

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Ultralong pulse (≳40 μs) fluorescence of ArF excimer molecules at 193 nm has been generated by dynamically mixing a pulse discharge excited He jet with neutral Ar/F₂ gas located downstream in a vacuum chamber. Rapid cooling of the high temperature He plasma through neutral gas collisions and efficient energy transfer to Ar gas create Ar metastable atoms, which form ArF excimer molecules through harpoon reactions with F₂, in relatively field-free space. The fluorescence intensity increased with increasing F ₂ concentration up to ∼10% F₂ in Ar with 2-atm backing pressure. In a preliminary experiment with an ArF probe laser, this mixture showed an amplification gain.

Original language	English
Pages (from-to)	1378-1380
Number of pages	3
Journal	Applied Physics Letters
Volume	61
Issue number	12
DOIs	https://doi.org/10.1063/1.107543
Publication status	Published - 1992

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.107543

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title = "Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas",

abstract = "Ultralong pulse (≳40 μs) fluorescence of ArF excimer molecules at 193 nm has been generated by dynamically mixing a pulse discharge excited He jet with neutral Ar/F2 gas located downstream in a vacuum chamber. Rapid cooling of the high temperature He plasma through neutral gas collisions and efficient energy transfer to Ar gas create Ar metastable atoms, which form ArF excimer molecules through harpoon reactions with F2, in relatively field-free space. The fluorescence intensity increased with increasing F 2 concentration up to ∼10% F2 in Ar with 2-atm backing pressure. In a preliminary experiment with an ArF probe laser, this mixture showed an amplification gain.",

author = "F. Sato and Y. Sunada and S. Okamoto and F. Kannari",

year = "1992",

doi = "10.1063/1.107543",

language = "English",

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journal = "Applied Physics Letters",

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T1 - Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas

AU - Sato, F.

AU - Sunada, Y.

AU - Okamoto, S.

AU - Kannari, F.

PY - 1992

Y1 - 1992

N2 - Ultralong pulse (≳40 μs) fluorescence of ArF excimer molecules at 193 nm has been generated by dynamically mixing a pulse discharge excited He jet with neutral Ar/F2 gas located downstream in a vacuum chamber. Rapid cooling of the high temperature He plasma through neutral gas collisions and efficient energy transfer to Ar gas create Ar metastable atoms, which form ArF excimer molecules through harpoon reactions with F2, in relatively field-free space. The fluorescence intensity increased with increasing F 2 concentration up to ∼10% F2 in Ar with 2-atm backing pressure. In a preliminary experiment with an ArF probe laser, this mixture showed an amplification gain.

AB - Ultralong pulse (≳40 μs) fluorescence of ArF excimer molecules at 193 nm has been generated by dynamically mixing a pulse discharge excited He jet with neutral Ar/F2 gas located downstream in a vacuum chamber. Rapid cooling of the high temperature He plasma through neutral gas collisions and efficient energy transfer to Ar gas create Ar metastable atoms, which form ArF excimer molecules through harpoon reactions with F2, in relatively field-free space. The fluorescence intensity increased with increasing F 2 concentration up to ∼10% F2 in Ar with 2-atm backing pressure. In a preliminary experiment with an ArF probe laser, this mixture showed an amplification gain.

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JO - Applied Physics Letters

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Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F₂ neutral gas

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