Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application

Takuya Fujii; Takeru Okada; Mohd Erman Syazwan; Taiga Isoda; Hirotaka Endo; Mohammad Maksudur Rahman; Kohei Ito; Seiji Samukawa

doi:10.1109/PVSC.2014.6925090

Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application

Takuya Fujii, Takeru Okada, Mohd Erman Syazwan, Taiga Isoda, Hirotaka Endo, Mohammad Maksudur Rahman, Kohei Ito, Seiji Samukawa

Department of Applied Physics and Physico-Informatics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

A high density uniform 10 nm amorphous Ge nanodisk structure could be successfully fabricated by a combination of a bio-template to fabricate a high density etching mask of 7 × 10¹¹cm^-2 and a neutral beam top-down process. Center-to-center distance of each ferritin was estimated at 13 nm. The fabricated Ge nanostructure showed increasing band gap energy from 1.5 eV up to 1.9 eV when the thickness of the nanostructure was decreased from 8 nm to 2 nm. The fabricated high density germanium nanostructure is expected to be used in many quantum effect devices such as quantum dot solar cells.

Original language	English
Title of host publication	2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1033-1036
Number of pages	4
ISBN (Electronic)	9781479943982
DOIs	https://doi.org/10.1109/PVSC.2014.6925090
Publication status	Published - 2014 Oct 15
Event	40th IEEE Photovoltaic Specialist Conference, PVSC 2014 - Denver, United States Duration: 2014 Jun 8 → 2014 Jun 13

Publication series

Name	2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014

Other

Other	40th IEEE Photovoltaic Specialist Conference, PVSC 2014
Country/Territory	United States
City	Denver
Period	14/6/8 → 14/6/13

Keywords

bio template
germanium nano disk
neutral beam etching
quantum dots. intermediate solar cell

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/PVSC.2014.6925090

Cite this

Fujii, T., Okada, T., Syazwan, M. E., Isoda, T., Endo, H., Rahman, M. M., Ito, K., & Samukawa, S. (2014). Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014 (pp. 1033-1036). Article 6925090 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2014.6925090

Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application. / Fujii, Takuya; Okada, Takeru; Syazwan, Mohd Erman et al.
2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1033-1036 6925090 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fujii, T, Okada, T, Syazwan, ME, Isoda, T, Endo, H, Rahman, MM, Ito, K & Samukawa, S 2014, Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application. in 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014., 6925090, 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014, Institute of Electrical and Electronics Engineers Inc., pp. 1033-1036, 40th IEEE Photovoltaic Specialist Conference, PVSC 2014, Denver, United States, 14/6/8. https://doi.org/10.1109/PVSC.2014.6925090

Fujii T, Okada T, Syazwan ME, Isoda T, Endo H, Rahman MM et al. Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1033-1036. 6925090. (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). doi: 10.1109/PVSC.2014.6925090

Fujii, Takuya ; Okada, Takeru ; Syazwan, Mohd Erman et al. / Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application. 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 1033-1036 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

@inproceedings{6b7b0813a94e4ab89d968258e2d5948e,

title = "Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application",

abstract = "A high density uniform 10 nm amorphous Ge nanodisk structure could be successfully fabricated by a combination of a bio-template to fabricate a high density etching mask of 7 × 1011cm-2 and a neutral beam top-down process. Center-to-center distance of each ferritin was estimated at 13 nm. The fabricated Ge nanostructure showed increasing band gap energy from 1.5 eV up to 1.9 eV when the thickness of the nanostructure was decreased from 8 nm to 2 nm. The fabricated high density germanium nanostructure is expected to be used in many quantum effect devices such as quantum dot solar cells.",

keywords = "bio template, germanium nano disk, neutral beam etching, quantum dots. intermediate solar cell",

author = "Takuya Fujii and Takeru Okada and Syazwan, {Mohd Erman} and Taiga Isoda and Hirotaka Endo and Rahman, {Mohammad Maksudur} and Kohei Ito and Seiji Samukawa",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 40th IEEE Photovoltaic Specialist Conference, PVSC 2014 ; Conference date: 08-06-2014 Through 13-06-2014",

year = "2014",

month = oct,

day = "15",

doi = "10.1109/PVSC.2014.6925090",

language = "English",

series = "2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1033--1036",

booktitle = "2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014",

}

TY - GEN

T1 - Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application

AU - Fujii, Takuya

AU - Okada, Takeru

AU - Syazwan, Mohd Erman

AU - Isoda, Taiga

AU - Endo, Hirotaka

AU - Rahman, Mohammad Maksudur

AU - Ito, Kohei

AU - Samukawa, Seiji

PY - 2014/10/15

Y1 - 2014/10/15

N2 - A high density uniform 10 nm amorphous Ge nanodisk structure could be successfully fabricated by a combination of a bio-template to fabricate a high density etching mask of 7 × 1011cm-2 and a neutral beam top-down process. Center-to-center distance of each ferritin was estimated at 13 nm. The fabricated Ge nanostructure showed increasing band gap energy from 1.5 eV up to 1.9 eV when the thickness of the nanostructure was decreased from 8 nm to 2 nm. The fabricated high density germanium nanostructure is expected to be used in many quantum effect devices such as quantum dot solar cells.

AB - A high density uniform 10 nm amorphous Ge nanodisk structure could be successfully fabricated by a combination of a bio-template to fabricate a high density etching mask of 7 × 1011cm-2 and a neutral beam top-down process. Center-to-center distance of each ferritin was estimated at 13 nm. The fabricated Ge nanostructure showed increasing band gap energy from 1.5 eV up to 1.9 eV when the thickness of the nanostructure was decreased from 8 nm to 2 nm. The fabricated high density germanium nanostructure is expected to be used in many quantum effect devices such as quantum dot solar cells.

KW - bio template

KW - germanium nano disk

KW - neutral beam etching

KW - quantum dots. intermediate solar cell

UR - http://www.scopus.com/inward/record.url?scp=84912058961&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84912058961&partnerID=8YFLogxK

U2 - 10.1109/PVSC.2014.6925090

DO - 10.1109/PVSC.2014.6925090

M3 - Conference contribution

AN - SCOPUS:84912058961

T3 - 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014

SP - 1033

EP - 1036

BT - 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 40th IEEE Photovoltaic Specialist Conference, PVSC 2014

Y2 - 8 June 2014 through 13 June 2014

ER -

Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this