Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid

Celine Hadji; Ichiro Fukada; Francois Baleras; Yoshihiro Taguchi; Beatrice Icard; Vincent Agache

doi:10.1109/TRANSDUCERS.2015.7181124

Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid

Celine Hadji, Ichiro Fukada, Francois Baleras, Yoshihiro Taguchi, Beatrice Icard, Vincent Agache

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports hollow MEMS plate oscillators for mass sensing in liquid with an extracted mass resolution of 7 femtograms. The sensors performances show a one-fold improvement compared to previous alike structures - 10,000-range Q factor and ppb-range frequency stability. These devices are connected through a customized plug and play test platform and do not need to work in a vacuum-sealed package. These performances, reached in ambient conditions whether the embedded channel is filled with air or water, make the devices potentially amenable to individual particles metrology from a few 10 nm up to the μm diameter range.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1121-1124
Number of pages	4
ISBN (Print)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181124
Publication status	Published - 2015 Aug 5
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: 2015 Jun 21 → 2015 Jun 25

Other

Other	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	15/6/21 → 15/6/25

Keywords

Allan deviation
Lamé mode resonators
mass sensing
MEMS
microfluidics

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2015.7181124

Cite this

Hadji, C., Fukada, I., Baleras, F., Taguchi, Y., Icard, B., & Agache, V. (2015). Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 1121-1124). Article 7181124 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181124

Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid. / Hadji, Celine; Fukada, Ichiro; Baleras, Francois et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1121-1124 7181124.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hadji, C, Fukada, I, Baleras, F, Taguchi, Y, Icard, B & Agache, V 2015, Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181124, Institute of Electrical and Electronics Engineers Inc., pp. 1121-1124, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 15/6/21. https://doi.org/10.1109/TRANSDUCERS.2015.7181124

Hadji C, Fukada I, Baleras F, Taguchi Y, Icard B, Agache V. Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1121-1124. 7181124 doi: 10.1109/TRANSDUCERS.2015.7181124

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title = "Hollow Lam{\'e} mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid",

abstract = "This paper reports hollow MEMS plate oscillators for mass sensing in liquid with an extracted mass resolution of 7 femtograms. The sensors performances show a one-fold improvement compared to previous alike structures - 10,000-range Q factor and ppb-range frequency stability. These devices are connected through a customized plug and play test platform and do not need to work in a vacuum-sealed package. These performances, reached in ambient conditions whether the embedded channel is filled with air or water, make the devices potentially amenable to individual particles metrology from a few 10 nm up to the μm diameter range.",

keywords = "Allan deviation, Lam{\'e} mode resonators, mass sensing, MEMS, microfluidics",

author = "Celine Hadji and Ichiro Fukada and Francois Baleras and Yoshihiro Taguchi and Beatrice Icard and Vincent Agache",

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Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid

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Keywords

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