TY - JOUR
T1 - Hydrolysis Deposition of Thin Films of Antimony-Doped Tin Oxide
AU - Tsukuma, Koji
AU - Akiyama, Tomoyuki
AU - Imai, Hiroaki
PY - 2001/4
Y1 - 2001/4
N2 - Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF3 and SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol% antimony heated at 500°C has an electrical resistivity of 1.0 × 10-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.
AB - Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF3 and SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol% antimony heated at 500°C has an electrical resistivity of 1.0 × 10-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.
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U2 - 10.1111/j.1151-2916.2001.tb00755.x
DO - 10.1111/j.1151-2916.2001.tb00755.x
M3 - Article
AN - SCOPUS:0035324295
SN - 0002-7820
VL - 84
SP - 869
EP - 871
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 4
ER -