Hydrolysis Deposition of Thin Films of Antimony-Doped Tin Oxide

Koji Tsukuma; Tomoyuki Akiyama; Hiroaki Imai

doi:10.1111/j.1151-2916.2001.tb00755.x

Hydrolysis Deposition of Thin Films of Antimony-Doped Tin Oxide

Koji Tsukuma
, Tomoyuki Akiyama
, Hiroaki Imai

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF₃ and SbF₃ produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol% antimony heated at 500°C has an electrical resistivity of 1.0 × 10^-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.

Original language	English
Pages (from-to)	869-871
Number of pages	3
Journal	Journal of the American Ceramic Society
Volume	84
Issue number	4
DOIs	https://doi.org/10.1111/j.1151-2916.2001.tb00755.x
Publication status	Published - 2001 Apr

ASJC Scopus subject areas

Ceramics and Composites
Materials Chemistry

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10.1111/j.1151-2916.2001.tb00755.x

Cite this

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title = "Hydrolysis Deposition of Thin Films of Antimony-Doped Tin Oxide",

abstract = "Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF3 and SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol\% antimony heated at 500°C has an electrical resistivity of 1.0 {\texttimes} 10-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.",

author = "Koji Tsukuma and Tomoyuki Akiyama and Hiroaki Imai",

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AU - Tsukuma, Koji

AU - Akiyama, Tomoyuki

AU - Imai, Hiroaki

PY - 2001/4

Y1 - 2001/4

N2 - Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF3 and SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol% antimony heated at 500°C has an electrical resistivity of 1.0 × 10-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.

AB - Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF3 and SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol% antimony heated at 500°C has an electrical resistivity of 1.0 × 10-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.

UR - https://www.scopus.com/pages/publications/0035324295

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SN - 0002-7820

VL - 84

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EP - 871

JO - Journal of the American Ceramic Society

JF - Journal of the American Ceramic Society

IS - 4

ER -

Hydrolysis Deposition of Thin Films of Antimony-Doped Tin Oxide

Abstract

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