Impact of the device scaling on the low-frequency noise in n-MOSFETs

H. M. Bu, Y. Shi, X. L. Yuan, Y. D. Zheng, S. H. Gu, H. Majima, H. Ishikuro, T. Hiramoto

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)


The impact of device scaling on modern MOS technology is discussed in terms of the random telegraph signals (RTSs) and low-frequency noise in n-MOSFETs with gradually decreased channel widths. RTSs with very large amplitude (> 60%) are observed in the devices with ultra-narrow channels at room temperature for the first time. Furthermore, low-frequency noise spectra having both 1/f′ and Lorentzian type are found separately in the same ultra-narrow channel at different gate bias voltage, whereas only 1/f′ noise is observed in relatively wide channels. The observations strongly suggest that low-frequency noise in weak inversion dominantly suffer from carrier mobility fluctuation rather than carrier number fluctuation in ultra-narrow channels, which is confirmed by numerical simulations.

Original languageEnglish
Pages (from-to)133-136
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Issue number2
Publication statusPublished - 2000 Aug
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)


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