Improvement of beam uniformity by magnetic filter optimization in a Cs-seeded large negative-ion source

The influence of magnetic filter configuration on the beam uniformity was examined to improve beam uniformity in a large Cs-seeded negative-ion source. By reducing the filter strength of the transverse magnetic field used in a typical negative-ion source, the beam uniformity was largely improved with the improvement of the plasma uniformity while the beam intensity was kept to be nearly constant. However, the coextracted electron current greatly increased. To suppress the coextracted electron current, a tent-shaped magnetic filter was applied together with modifications in the cusp magnets to form a typical multicusp positive-ion source arrangement. The uniformity in longitudinal beam profile was improved with the deviation of local beam intensity within 16% that was nearly equal to the deviation obtained at 50 G cm of the transverse filter strength. In the meantime, the coextracted electron current was kept to be the same as the H- ion current. The present result suggests that the uniformity of H- ion-beam profile is affected by the uniformity of atoms or protons in the source plasma, which are the primary species of negative ions under Cs-seeded surface production.