In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

Kosuke Abe; Hidetoshi Takahashi; Tomoyuki Takahata; Isao Shimoyama

doi:10.1109/MEMSYS.2019.8870841

In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

Kosuke Abe, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	680-683
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870841
Publication status	Published - 2019 Jan
Externally published	Yes
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 2019 Jan 27 → 2019 Jan 31

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	19/1/27 → 19/1/31

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2019.8870841

Cite this

Abe, K., Takahashi, H., Takahata, T., & Shimoyama, I. (2019). In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 680-683). Article 8870841 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870841

In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. / Abe, Kosuke; Takahashi, Hidetoshi; Takahata, Tomoyuki et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 680-683 8870841 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abe, K, Takahashi, H, Takahata, T & Shimoyama, I 2019, In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870841, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 680-683, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 19/1/27. https://doi.org/10.1109/MEMSYS.2019.8870841

Abe K, Takahashi H, Takahata T, Shimoyama I. In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 680-683. 8870841. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870841

Abe, Kosuke ; Takahashi, Hidetoshi ; Takahata, Tomoyuki et al. / In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 680-683 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{f20bf2f9cb3a40398d9de023794904aa,

title = "In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping",

abstract = "This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.",

author = "Kosuke Abe and Hidetoshi Takahashi and Tomoyuki Takahata and Isao Shimoyama",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870841",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "680--683",

booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",

}

TY - GEN

T1 - In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

AU - Abe, Kosuke

AU - Takahashi, Hidetoshi

AU - Takahata, Tomoyuki

AU - Shimoyama, Isao

PY - 2019/1

Y1 - 2019/1

N2 - This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.

AB - This paper reports a gyroscope using sidewall doped piezoresistors and vibrating mass by Lorentz force. With sidewall doped piezoresistors, in-plane deformation of the beams due to Coriolis force generated by angular motion can be detected, which was difficult with surface doped piezoresistors. The proposed gyroscope was designed so that the resonant frequencies of the driving and sensing modes were similar to each other. It was demonstrated that the developed gyroscope measured angular velocity through the resistance change of the piezoresistive beams.

UR - http://www.scopus.com/inward/record.url?scp=85074322206&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85074322206&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2019.8870841

DO - 10.1109/MEMSYS.2019.8870841

M3 - Conference contribution

AN - SCOPUS:85074322206

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 680

EP - 683

BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019

Y2 - 27 January 2019 through 31 January 2019

ER -

In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall Doping

Abstract

Publication series

Conference

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this