In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering

K. Sakurai; R. Hunger; R. Scheer; C. A. Kaufmann; A. Yamada; T. Baba; Y. Kimura; K. Matsubara; P. Fons; H. Nakanishi; S. Niki

doi:10.1002/pip.519

In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering

K. Sakurai, R. Hunger, R. Scheer, C. A. Kaufmann, A. Yamada, T. Baba, Y. Kimura, K. Matsubara, P. Fons, H. Nakanishi, S. Niki

Research output: Contribution to journal › Article › peer-review

62 Citations (Scopus)

Abstract

Deposition processes of Cu(In,Ga)Se₂ (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film properties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ.

Original language	English
Pages (from-to)	219-234
Number of pages	16
Journal	Progress in Photovoltaics: Research and Applications
Volume	12
Issue number	2-3
DOIs	https://doi.org/10.1002/pip.519
Publication status	Published - 2004
Externally published	Yes

Keywords

CIGS
Pyrometer
Roughness
SLS
Se overpressure
Solar cells
Spectroscopic light scattering
Thickness

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Condensed Matter Physics
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1002/pip.519

Cite this

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title = "In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering",

abstract = "Deposition processes of Cu(In,Ga)Se2 (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film properties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ.",

keywords = "CIGS, Pyrometer, Roughness, SLS, Se overpressure, Solar cells, Spectroscopic light scattering, Thickness",

author = "K. Sakurai and R. Hunger and R. Scheer and Kaufmann, {C. A.} and A. Yamada and T. Baba and Y. Kimura and K. Matsubara and P. Fons and H. Nakanishi and S. Niki",

year = "2004",

doi = "10.1002/pip.519",

language = "English",

volume = "12",

pages = "219--234",

journal = "Progress in Photovoltaics: Research and Applications",

issn = "1062-7995",

publisher = "John Wiley and Sons Ltd",

number = "2-3",

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TY - JOUR

T1 - In situ diagnostic methods for thin-film fabrication

T2 - Utilization of heat radiation and light scattering

AU - Sakurai, K.

AU - Hunger, R.

AU - Scheer, R.

AU - Kaufmann, C. A.

AU - Yamada, A.

AU - Baba, T.

AU - Kimura, Y.

AU - Matsubara, K.

AU - Fons, P.

AU - Nakanishi, H.

AU - Niki, S.

PY - 2004

Y1 - 2004

N2 - Deposition processes of Cu(In,Ga)Se2 (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film properties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ.

AB - Deposition processes of Cu(In,Ga)Se2 (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film properties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ.

KW - CIGS

KW - Pyrometer

KW - Roughness

KW - SLS

KW - Se overpressure

KW - Solar cells

KW - Spectroscopic light scattering

KW - Thickness

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U2 - 10.1002/pip.519

DO - 10.1002/pip.519

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AN - SCOPUS:1842781608

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JO - Progress in Photovoltaics: Research and Applications

JF - Progress in Photovoltaics: Research and Applications

IS - 2-3

ER -

In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

Access to Document

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