Abstract
We have successfully developed control of the growth mode of carbon nanotubes (CNTs) by using titanium film and its oxidized form, and measured physical properties. The growth mode of CNTs can be controlled by the under layers of catalysts. Obtained CNT films have the site density of 1010 cm-2 for both the base- and tip-growth modes. Measured electrical resistance of 2-μm-diameter CNT-via, mechanical strength, and thermal conductivity for the base-growth mode CNT films were 91.1 Ω, 670 kPa and 291 W/mK, respectively. Better physical properties were observed for base-growth mode CNT films, compared with the tip-growth mode CNT films. In the base-growth mode, one CNT with a TiC contact had an estimated low electrical resistance of 100 kΩ, a high mechanical strength of 5.5 MPa, and a high thermal conductivity of 2400 W/mK.
Original language | English |
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Pages (from-to) | 7337-7341 |
Number of pages | 5 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 43 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2004 Oct |
Externally published | Yes |
Keywords
- Base-growth mode CNT
- Electrical resistance
- Mechanical strength
- Multiwalled carbon nanotubes
- Thermal conductivity
- Tip-growth mode CNT
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)