Abstract
Optical signal processing circuits can realize ultimately efficient signal processing. Optical micro-cavities, which can localize light at certain spots, are important components for the circuits. Single-crystal calcium fluoride (CaF2) is the most suitable material for highly efficient optical micro-cavities, and ultra-precision cylindrical turning (UPCT) is a feasible fabrication process for CaF2 optical micro-cavities. However, CaF2 is characterized by brittleness and crystal anisotropy; therefore, it is necessary to prevent microcracks in UPCT because such cracks would lead to light scattering and cavity performance deterioration. In this study, we conduct plunge-cut tests on CaF2 substrate with various single point diamond tools, and experimentally investigate the influence of tool geometry and process parameters on critical depth of cut. Based on the experimental results, enhancement of CaF2 micro-cavity is attempted.
Original language | English |
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Title of host publication | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 |
Publisher | euspen |
Pages | 117-118 |
Number of pages | 2 |
ISBN (Electronic) | 9780995775107 |
Publication status | Published - 2017 Jan 1 |
Event | 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 - Hannover, Germany Duration: 2017 May 29 → 2017 Jun 2 |
Other
Other | 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 |
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Country/Territory | Germany |
City | Hannover |
Period | 17/5/29 → 17/6/2 |
Keywords
- Anisotropy
- Optical
- Single crystal
- Ultra-precision
ASJC Scopus subject areas
- Materials Science(all)
- Mechanical Engineering
- Instrumentation
- Industrial and Manufacturing Engineering
- Environmental Engineering