TY - JOUR
T1 - Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication
AU - Wu, Zhiwei
AU - Zhou, Fei
AU - Wang, Qianzhi
AU - Zhou, Zhifeng
AU - Yan, Jiwang
AU - Li, Lawrence Kwok Yan
N1 - Funding Information:
This work was supported by National Natural Science Foundation of China (grant no. 51375231 ), The Research Fund for the Doctoral Program of Higher Education (grant no. 20133218110030 ). A Project Funded by Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD) ; Funding of Jiangsu Innovation Program for Graduate Education (grant no. KYLX0234 ) and the Fundamental Research Funds for the Central Universities . We would like to acknowledge them for their financial support.
PY - 2015/11/15
Y1 - 2015/11/15
N2 - CrSiCN coatings with different silicon and carbon contents were deposited on silicon wafers and 316L stainless steels using unbalanced magnetron sputtering via adjusting trimethylsilane (TMS) flow, and their microstructure and mechanical properties were characterized by X-ray diffraction (XRD), scanning electron microscopy(SEM), X-ray photoelectrons spectroscopy(XPS) and nano-indenter, respectively. The tribological properties of CrSiCN coatings sliding against SiC balls in water were investigated using ball-on-disk tribometer. The results showed that the CrSiCN coatings had fine composite microstructure consisting of nanocrystallites of Cr(C, N) crystal and amorphous phases such as a-Si 3 N 4 and a-C(a-CN x ). The typical columnar structures changed from fine cluster to coarse ones when the Si content was beyond 3.4 at.%. With an increase in the TMS flow, the hardness and Young's modulus of Corsican coatings all first increased, and then rapidly decreased, but the compressive stress in the coatings varied in the range of 2.8-4.8 GPa. When the TMS flow was 10 sccm, the CrSiCN coatings exhibited the highest hardness of 21.3 GPa and the lowest friction coefficient (0.11) and wear rate (8.4 × 10 -8 mm 3 /N m). But when the TMS flow was beyond 15 sccm, the tribological properties of CrSiCN coatings in water became poor.
AB - CrSiCN coatings with different silicon and carbon contents were deposited on silicon wafers and 316L stainless steels using unbalanced magnetron sputtering via adjusting trimethylsilane (TMS) flow, and their microstructure and mechanical properties were characterized by X-ray diffraction (XRD), scanning electron microscopy(SEM), X-ray photoelectrons spectroscopy(XPS) and nano-indenter, respectively. The tribological properties of CrSiCN coatings sliding against SiC balls in water were investigated using ball-on-disk tribometer. The results showed that the CrSiCN coatings had fine composite microstructure consisting of nanocrystallites of Cr(C, N) crystal and amorphous phases such as a-Si 3 N 4 and a-C(a-CN x ). The typical columnar structures changed from fine cluster to coarse ones when the Si content was beyond 3.4 at.%. With an increase in the TMS flow, the hardness and Young's modulus of Corsican coatings all first increased, and then rapidly decreased, but the compressive stress in the coatings varied in the range of 2.8-4.8 GPa. When the TMS flow was 10 sccm, the CrSiCN coatings exhibited the highest hardness of 21.3 GPa and the lowest friction coefficient (0.11) and wear rate (8.4 × 10 -8 mm 3 /N m). But when the TMS flow was beyond 15 sccm, the tribological properties of CrSiCN coatings in water became poor.
KW - CrSiCN coatings
KW - Microstructure
KW - Nano-hardness
KW - Tribological properties
KW - Water lubrication
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U2 - 10.1016/j.apsusc.2015.07.146
DO - 10.1016/j.apsusc.2015.07.146
M3 - Article
AN - SCOPUS:84941271606
SN - 0169-4332
VL - 355
SP - 516
EP - 530
JO - Applied Surface Science
JF - Applied Surface Science
ER -