Infrared Photodetector with Copper Resonator in Silicon Nanohole Array

Shun Yasunaga; Tetsuo Kan; Hidetoshi Takahashi; Tomoyuki Takahata; Isao Shimoyama

doi:10.1109/TRANSDUCERS.2019.8808478

Infrared Photodetector with Copper Resonator in Silicon Nanohole Array

Shun Yasunaga, Tetsuo Kan, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A silicon-based infrared photodetector with metal nanostructures has been drawing attention, while lacking sufficient responsivity. We hereby present a silicon-based infrared photodetector furnished with an array of a nano-scale copper plate which induces localized surface plasmon resonance (LSPR). Each plate is placed at the bottom of a nanohole on a silicon substrate. This device possesses two features: electrically-connected copper resonators and backside-illuminating configuration. They lead to efficient photocurrent generation. As LSPR couples with vertically incident light, this structure can be a solution of realizing a silicon-based infrared photodetector that can be adapted to prevalent semiconductor devices.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	633-636
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808478
Publication status	Published - 2019 Jun
Externally published	Yes
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 2019 Jun 23 → 2019 Jun 27

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	19/6/23 → 19/6/27

Keywords

Infrared photodetector
Schottky junction
backside illumination
localized surface plasmon resonance

ASJC Scopus subject areas

Process Chemistry and Technology
Spectroscopy
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation

Access to Document

10.1109/TRANSDUCERS.2019.8808478

Cite this

Yasunaga, S., Kan, T., Takahashi, H., Takahata, T., & Shimoyama, I. (2019). Infrared Photodetector with Copper Resonator in Silicon Nanohole Array. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 633-636). Article 8808478 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808478

Infrared Photodetector with Copper Resonator in Silicon Nanohole Array. / Yasunaga, Shun; Kan, Tetsuo; Takahashi, Hidetoshi et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 633-636 8808478 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yasunaga, S, Kan, T, Takahashi, H, Takahata, T & Shimoyama, I 2019, Infrared Photodetector with Copper Resonator in Silicon Nanohole Array. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808478, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 633-636, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808478

Yasunaga S, Kan T, Takahashi H, Takahata T, Shimoyama I. Infrared Photodetector with Copper Resonator in Silicon Nanohole Array. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 633-636. 8808478. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808478

Yasunaga, Shun ; Kan, Tetsuo ; Takahashi, Hidetoshi et al. / Infrared Photodetector with Copper Resonator in Silicon Nanohole Array. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 633-636 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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title = "Infrared Photodetector with Copper Resonator in Silicon Nanohole Array",

abstract = "A silicon-based infrared photodetector with metal nanostructures has been drawing attention, while lacking sufficient responsivity. We hereby present a silicon-based infrared photodetector furnished with an array of a nano-scale copper plate which induces localized surface plasmon resonance (LSPR). Each plate is placed at the bottom of a nanohole on a silicon substrate. This device possesses two features: electrically-connected copper resonators and backside-illuminating configuration. They lead to efficient photocurrent generation. As LSPR couples with vertically incident light, this structure can be a solution of realizing a silicon-based infrared photodetector that can be adapted to prevalent semiconductor devices.",

keywords = "Infrared photodetector, Schottky junction, backside illumination, localized surface plasmon resonance",

author = "Shun Yasunaga and Tetsuo Kan and Hidetoshi Takahashi and Tomoyuki Takahata and Isao Shimoyama",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808478",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

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booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

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AU - Shimoyama, Isao

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AB - A silicon-based infrared photodetector with metal nanostructures has been drawing attention, while lacking sufficient responsivity. We hereby present a silicon-based infrared photodetector furnished with an array of a nano-scale copper plate which induces localized surface plasmon resonance (LSPR). Each plate is placed at the bottom of a nanohole on a silicon substrate. This device possesses two features: electrically-connected copper resonators and backside-illuminating configuration. They lead to efficient photocurrent generation. As LSPR couples with vertically incident light, this structure can be a solution of realizing a silicon-based infrared photodetector that can be adapted to prevalent semiconductor devices.

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Infrared Photodetector with Copper Resonator in Silicon Nanohole Array

Abstract

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Keywords

ASJC Scopus subject areas

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