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Interface toughness evaluation with specimens fabricated by focused ion beam for micro scale devices and packages

  • Nobuyuki Shishido
  • , Satoru Matsumoto
  • , Chuantong Chen
  • , Hisashi Sato
  • , Masaki Omiya
  • , Shoji Kamiya
  • , Masahiro Nishida
  • , Takeshi Nokuo
  • , Tadahiro Nagasawa
  • , Takashi Suzuki
  • , Tomoji Nakamura

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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