Interfacial reactions and microstructure of BaTiO                         3                          films prepared using fluoride precursor method

Shinobu Fujihara; Theodor Schneller; Rainer Waser

doi:10.1016/S0169-4332(03)00869-9

Interfacial reactions and microstructure of BaTiO ₃ films prepared using fluoride precursor method

Shinobu Fujihara, Theodor Schneller, Rainer Waser

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Interfacial reactions of BaF ₂ and TiO ₂ were investigated in preparing BaTiO ₃ thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF ₃ COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 °C in air and were finally heated typically at 700 °C in a water vapor atmosphere. The perovskite BaTiO ₃ phase was obtained although a small portion of BaF ₂ remained unreacted. Thus, the films were characterized as the mixture of BaTiO ₃ , BaF ₂ , and amorphous TiO ₂ . Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase.

Original language	English
Pages (from-to)	178-183
Number of pages	6
Journal	Applied Surface Science
Volume	221
Issue number	1-4
DOIs	https://doi.org/10.1016/S0169-4332(03)00869-9
Publication status	Published - 2004 Jan 15

Keywords

Barium fluoride
Barium titanate
Sol-gel
Thin film

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/S0169-4332(03)00869-9

Cite this

Interfacial reactions and microstructure of BaTiO ₃ films prepared using fluoride precursor method . / Fujihara, Shinobu; Schneller, Theodor; Waser, Rainer.
In: Applied Surface Science, Vol. 221, No. 1-4, 15.01.2004, p. 178-183.

Research output: Contribution to journal › Article › peer-review

@article{961391735a7e4988b899bd6515a95ce2,

title = " Interfacial reactions and microstructure of BaTiO 3 films prepared using fluoride precursor method ",

abstract = " Interfacial reactions of BaF 2 and TiO 2 were investigated in preparing BaTiO 3 thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF 3 COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 °C in air and were finally heated typically at 700 °C in a water vapor atmosphere. The perovskite BaTiO 3 phase was obtained although a small portion of BaF 2 remained unreacted. Thus, the films were characterized as the mixture of BaTiO 3 , BaF 2 , and amorphous TiO 2 . Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase.",

keywords = "Barium fluoride, Barium titanate, Sol-gel, Thin film",

author = "Shinobu Fujihara and Theodor Schneller and Rainer Waser",

year = "2004",

month = jan,

day = "15",

doi = "10.1016/S0169-4332(03)00869-9",

language = "English",

volume = "221",

pages = "178--183",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Interfacial reactions and microstructure of BaTiO 3 films prepared using fluoride precursor method

AU - Fujihara, Shinobu

AU - Schneller, Theodor

AU - Waser, Rainer

PY - 2004/1/15

Y1 - 2004/1/15

N2 - Interfacial reactions of BaF 2 and TiO 2 were investigated in preparing BaTiO 3 thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF 3 COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 °C in air and were finally heated typically at 700 °C in a water vapor atmosphere. The perovskite BaTiO 3 phase was obtained although a small portion of BaF 2 remained unreacted. Thus, the films were characterized as the mixture of BaTiO 3 , BaF 2 , and amorphous TiO 2 . Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase.

AB - Interfacial reactions of BaF 2 and TiO 2 were investigated in preparing BaTiO 3 thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF 3 COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 °C in air and were finally heated typically at 700 °C in a water vapor atmosphere. The perovskite BaTiO 3 phase was obtained although a small portion of BaF 2 remained unreacted. Thus, the films were characterized as the mixture of BaTiO 3 , BaF 2 , and amorphous TiO 2 . Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase.

KW - Barium fluoride

KW - Barium titanate

KW - Sol-gel

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=0345171048&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0345171048&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(03)00869-9

DO - 10.1016/S0169-4332(03)00869-9

M3 - Article

AN - SCOPUS:0345171048

SN - 0169-4332

VL - 221

SP - 178

EP - 183

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -