TY - JOUR
T1 - Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas
AU - Nishida, K.
AU - Mattei, S.
AU - Mochizuki, S.
AU - Lettry, J.
AU - Hatayama, A.
N1 - Publisher Copyright:
© 2016 Author(s).
Copyright:
Copyright 2018 Elsevier B.V., All rights reserved.
PY - 2016/6/21
Y1 - 2016/6/21
N2 - Radio Frequency (RF) Inductively Coupled Plasmas (ICPs) are widely known for their two discharge modes, i.e., H-mode and E-mode, where the dynamics of the plasmas are completely different from each other. We have performed a kinetic simulation of a hydrogen plasma discharge in order to clarify the discharge mechanism and the E-to-H transition of the RF ICPs. The numerical simulation results, such as the time variations of spatial distribution of electron density and the power dissipated in the plasma, show the characteristic changes of the plasma dynamics due to E-to-H mode transition. Especially, the drastic change during the mode transition has been observed in the time evolution of the electron energy distribution function (EEDF). The EEDF deviates from a Maxwellian distribution before/after the transition and the deviation is more significant in the E-mode phase. These results indicate the importance of kinetic modeling for the physical understanding of E-to-H transition.
AB - Radio Frequency (RF) Inductively Coupled Plasmas (ICPs) are widely known for their two discharge modes, i.e., H-mode and E-mode, where the dynamics of the plasmas are completely different from each other. We have performed a kinetic simulation of a hydrogen plasma discharge in order to clarify the discharge mechanism and the E-to-H transition of the RF ICPs. The numerical simulation results, such as the time variations of spatial distribution of electron density and the power dissipated in the plasma, show the characteristic changes of the plasma dynamics due to E-to-H mode transition. Especially, the drastic change during the mode transition has been observed in the time evolution of the electron energy distribution function (EEDF). The EEDF deviates from a Maxwellian distribution before/after the transition and the deviation is more significant in the E-mode phase. These results indicate the importance of kinetic modeling for the physical understanding of E-to-H transition.
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U2 - 10.1063/1.4953647
DO - 10.1063/1.4953647
M3 - Article
AN - SCOPUS:84975746729
SN - 0021-8979
VL - 119
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 23
M1 - 233302
ER -