Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array

Gakuto Kagawa; Hidetoshi Takahashi

doi:10.1109/MEMS49605.2023.10052567

Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array

Gakuto Kagawa, Hidetoshi Takahashi

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports liquid-immersion inclined/rotated UV lithography for fabricating micro suction cups. Microstructures such as micro suction cups have been applied in various applications. However, the conventional fabrication method had limitations in suction force due to the insufficient inclination angle. We proposed liquid-immersion to inclined/rotated exposure (IRE), enabling greater microstructure inclination angles. IRE equipment was developed to fabricate PDMS micro suction cup arrays. The experimental inclination angle reached 51°, nearly doubling the conventional IRE method.

Original language	English
Title of host publication	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	610-612
Number of pages	3
ISBN (Electronic)	9781665493086
DOIs	https://doi.org/10.1109/MEMS49605.2023.10052567
Publication status	Published - 2023
Event	36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 - Munich, Germany Duration: 2023 Jan 15 → 2023 Jan 19

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2023-January
ISSN (Print)	1084-6999

Conference

Conference	36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
Country/Territory	Germany
City	Munich
Period	23/1/15 → 23/1/19

Keywords

Inclined/rotated lithography
Liquid-immersion lithography
Suction cup

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS49605.2023.10052567

Cite this

Kagawa, G., & Takahashi, H. (2023). Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 (pp. 610-612). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS49605.2023.10052567

Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. / Kagawa, Gakuto; Takahashi, Hidetoshi.
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 610-612 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kagawa, G & Takahashi, H 2023, Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2023-January, Institute of Electrical and Electronics Engineers Inc., pp. 610-612, 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023, Munich, Germany, 23/1/15. https://doi.org/10.1109/MEMS49605.2023.10052567

Kagawa G, Takahashi H. Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 610-612. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS49605.2023.10052567

Kagawa, Gakuto ; Takahashi, Hidetoshi. / Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array. 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 610-612 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{42b4b501165e4f3fac1b3afaa7993d3d,

title = "Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array",

abstract = "This paper reports liquid-immersion inclined/rotated UV lithography for fabricating micro suction cups. Microstructures such as micro suction cups have been applied in various applications. However, the conventional fabrication method had limitations in suction force due to the insufficient inclination angle. We proposed liquid-immersion to inclined/rotated exposure (IRE), enabling greater microstructure inclination angles. IRE equipment was developed to fabricate PDMS micro suction cup arrays. The experimental inclination angle reached 51°, nearly doubling the conventional IRE method.",

keywords = "Inclined/rotated lithography, Liquid-immersion lithography, Suction cup",

author = "Gakuto Kagawa and Hidetoshi Takahashi",

note = "Funding Information: This work was partly supported by Mitutoyo Association for Science and Technology (MAST). Publisher Copyright: {\textcopyright} 2023 IEEE.; 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",

year = "2023",

doi = "10.1109/MEMS49605.2023.10052567",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "610--612",

booktitle = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023",

}

TY - GEN

T1 - Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array

AU - Kagawa, Gakuto

AU - Takahashi, Hidetoshi

PY - 2023

Y1 - 2023

N2 - This paper reports liquid-immersion inclined/rotated UV lithography for fabricating micro suction cups. Microstructures such as micro suction cups have been applied in various applications. However, the conventional fabrication method had limitations in suction force due to the insufficient inclination angle. We proposed liquid-immersion to inclined/rotated exposure (IRE), enabling greater microstructure inclination angles. IRE equipment was developed to fabricate PDMS micro suction cup arrays. The experimental inclination angle reached 51°, nearly doubling the conventional IRE method.

AB - This paper reports liquid-immersion inclined/rotated UV lithography for fabricating micro suction cups. Microstructures such as micro suction cups have been applied in various applications. However, the conventional fabrication method had limitations in suction force due to the insufficient inclination angle. We proposed liquid-immersion to inclined/rotated exposure (IRE), enabling greater microstructure inclination angles. IRE equipment was developed to fabricate PDMS micro suction cup arrays. The experimental inclination angle reached 51°, nearly doubling the conventional IRE method.

KW - Inclined/rotated lithography

KW - Liquid-immersion lithography

KW - Suction cup

UR - http://www.scopus.com/inward/record.url?scp=85149820118&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85149820118&partnerID=8YFLogxK

U2 - 10.1109/MEMS49605.2023.10052567

DO - 10.1109/MEMS49605.2023.10052567

M3 - Conference contribution

AN - SCOPUS:85149820118

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 610

EP - 612

BT - 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023

Y2 - 15 January 2023 through 19 January 2023

ER -

Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array

Abstract

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Keywords

ASJC Scopus subject areas

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