Skip to main navigation Skip to search Skip to main content

Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

  • T. Tanaka
  • , K. Tabuchi
  • , K. Tatehora
  • , Y. Shiiki
  • , S. Nakagawa
  • , T. Takahashi
  • , R. Shimizu
  • , H. Ishikuro
  • , T. Kuroda
  • , T. Yanagida
  • , K. Uchida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The thermal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.

Original languageEnglish
Title of host publication2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesT158-T159
ISBN (Electronic)9784863487185
DOIs
Publication statusPublished - 2019 Jun
Event33rd Symposium on VLSI Circuits, VLSI Circuits 2019 - Kyoto, Japan
Duration: 2019 Jun 92019 Jun 14

Publication series

NameIEEE Symposium on VLSI Circuits, Digest of Technical Papers
Volume2019-June
ISSN (Print)2158-5601
ISSN (Electronic)2158-5636

Conference

Conference33rd Symposium on VLSI Circuits, VLSI Circuits 2019
Country/TerritoryJapan
CityKyoto
Period19/6/919/6/14

Keywords

  • Gas Sensor
  • Nanosheet
  • Self-Heating

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets'. Together they form a unique fingerprint.

Cite this