Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

Naoko Asakuma; Toshimi Fukui; Motoyuki Toki; Hiroaki Imai

doi:10.1023/A:1022640228969

Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

Naoko Asakuma, Toshimi Fukui, Motoyuki Toki, Hiroaki Imai

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm₂) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

Original language	English
Pages (from-to)	91-95
Number of pages	5
Journal	Journal of Sol-Gel Science and Technology
Volume	27
Issue number	1
DOIs	https://doi.org/10.1023/A:1022640228969
Publication status	Published - 2003 May

Keywords

ITO
Organic polymer
Sol-gel
Ultraviolet laser

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Chemistry(all)
Biomaterials
Condensed Matter Physics
Materials Chemistry

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abstract = "The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.",

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author = "Naoko Asakuma and Toshimi Fukui and Motoyuki Toki and Hiroaki Imai",

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AU - Asakuma, Naoko

AU - Fukui, Toshimi

AU - Toki, Motoyuki

AU - Imai, Hiroaki

PY - 2003/5

Y1 - 2003/5

N2 - The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

AB - The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

KW - ITO

KW - Organic polymer

KW - Sol-gel

KW - Ultraviolet laser

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Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

Abstract

Keywords

ASJC Scopus subject areas

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