Manufacturing structured surface by combining microindentation and ultraprecision cutting

Jiwang Yan, Akihiro Horikoshi, Tsunemoto Kuriyagawa, Yasunori Fukushima

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


A manufacturing method for structured surfaces by combining microindentation and ultraprecision cutting was proposed. Firstly, microindentation was performed on metal materials, such as oxygen free copper and electroless-plated nickel, to generate micro dimples with curved cross-sectional profiles. Secondly, material pile-ups formed around the micro dimples during microindentation were removed by ultraprecision cutting using diamond tools. Piezo actuated high-speed repetitive microindentation tests were performed, and effects of indentation depth, indentation load, indentation pitch and indenter vibration on dimple form accuracy and surface property were experimentally investigated. Effects of cutting conditions on pile-up removal behavior were examined in the diamond turning process after indentation.

Original languageEnglish
Pages (from-to)41-47
Number of pages7
JournalCIRP Journal of Manufacturing Science and Technology
Issue number1
Publication statusPublished - 2012
Externally publishedYes


  • Lens array
  • Microindentation
  • Optical elements
  • Structured surface
  • Ultraprecision cutting

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering


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