TY - GEN
T1 - Measurement of vacuum pressure with cantilever-based differential pressure sensor utilizing vapor pressure and narrow gap of cantilever
AU - Namioka, N.
AU - Takei, Y.
AU - Minh-Dung, N.
AU - Usami, T.
AU - Thanh-Vinh, N.
AU - Takahashi, Hidetoshi
AU - Takahata, T.
AU - Matsumoto, K.
AU - Shimoyama, I.
PY - 2016/2/26
Y1 - 2016/2/26
N2 - This paper reports a measurement method of vacuum pressure from 10-1 to 103 Pa with a piezoresistive cantilever-based differential pressure sensor (DPS). The gap around the cantilever of the DPS was narrow (2 μm) so that the air flow through it was suppressed. The through-hole beneath the sensor is connected to a chamber which is filled with saturated vapor. This method allows the pressure of the chamber to be stable at the vapor pressure of the liquid even when the exterior was vacuumed. The exterior vacuum pressure was calculated from the cantilever output since the vapor pressure of the chamber is known. We showed that the lower limit of measurable range was expanded into 0.1 Pa owing to noise reduction. The proposed method is promising to realize wide-range vacuum pressure measurement.
AB - This paper reports a measurement method of vacuum pressure from 10-1 to 103 Pa with a piezoresistive cantilever-based differential pressure sensor (DPS). The gap around the cantilever of the DPS was narrow (2 μm) so that the air flow through it was suppressed. The through-hole beneath the sensor is connected to a chamber which is filled with saturated vapor. This method allows the pressure of the chamber to be stable at the vapor pressure of the liquid even when the exterior was vacuumed. The exterior vacuum pressure was calculated from the cantilever output since the vapor pressure of the chamber is known. We showed that the lower limit of measurable range was expanded into 0.1 Pa owing to noise reduction. The proposed method is promising to realize wide-range vacuum pressure measurement.
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U2 - 10.1109/MEMSYS.2016.7421759
DO - 10.1109/MEMSYS.2016.7421759
M3 - Conference contribution
AN - SCOPUS:84971014324
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 836
EP - 838
BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Y2 - 24 January 2016 through 28 January 2016
ER -