Measurements of charged particles in the laser ablation plume of polymers

T. Fujii, S. Inoue, F. Kannari

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Charged particles in organic polymer plumes photoablated by ultraviolet lasers are measured with a Faraday cup assembly. In spite of a relatively low F2 laser (157 nm) fluence <1 J/cm2, relative charged fragment concentrations measured for polyimide, polytetrafluoroethylene, and polyethyleneterephthalate targets are ≳10-3. Charged particle concentrations in the ablation plumes generated by an F2 laser with polyethyleneterephthalate and polyimide targets are always higher than those in KrF laser (248 nm) ablation plumes at the same specific laser energy deposited on the target. Charged fragments have also higher velocities in the F 2 laser ablation plumes. An exponential increase in the charged fragment concentration with increasing laser fluence suggests that the ions are mainly produced through electron-neutral collisions in the hot material core close to the target surface.

Original languageEnglish
Pages (from-to)3401-3407
Number of pages7
JournalJournal of Applied Physics
Volume78
Issue number5
DOIs
Publication statusPublished - 1995

ASJC Scopus subject areas

  • General Physics and Astronomy

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