Mechanical properties of few layer graphene cantilever

Kazuma Matsui; Akira Inaba; Yuta Oshidari; Yusuke Takei; Hidetoshi Takahashi; Tomoyuki Takahata; Reo Kometani; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2014.6765834

Mechanical properties of few layer graphene cantilever

Kazuma Matsui, Akira Inaba, Yuta Oshidari, Yusuke Takei, Hidetoshi Takahashi, Tomoyuki Takahata, Reo Kometani, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

12 Citations (Scopus)

Abstract

We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1087-1090
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765834
Publication status	Published - 2014 Jan 1
Externally published	Yes
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2014.6765834

Cite this

Matsui, K., Inaba, A., Oshidari, Y., Takei, Y., Takahashi, H., Takahata, T., Kometani, R., Matsumoto, K., & Shimoyama, I. (2014). Mechanical properties of few layer graphene cantilever. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1087-1090). Article 6765834 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765834

Mechanical properties of few layer graphene cantilever. / Matsui, Kazuma; Inaba, Akira; Oshidari, Yuta et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1087-1090 6765834 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Matsui, K, Inaba, A, Oshidari, Y, Takei, Y, Takahashi, H, Takahata, T, Kometani, R, Matsumoto, K & Shimoyama, I 2014, Mechanical properties of few layer graphene cantilever. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765834, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1087-1090, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765834

Matsui K, Inaba A, Oshidari Y, Takei Y, Takahashi H, Takahata T et al. Mechanical properties of few layer graphene cantilever. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1087-1090. 6765834. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765834

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title = "Mechanical properties of few layer graphene cantilever",

abstract = "We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.",

author = "Kazuma Matsui and Akira Inaba and Yuta Oshidari and Yusuke Takei and Hidetoshi Takahashi and Tomoyuki Takahata and Reo Kometani and Kiyoshi Matsumoto and Isao Shimoyama",

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AU - Inaba, Akira

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AU - Takahata, Tomoyuki

AU - Kometani, Reo

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

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AB - We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

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Mechanical properties of few layer graphene cantilever

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