Membrane oscillator as a chemical sensor - Part 1: Fabrication of TM pipet

Toyosaka Moriizumi, Paulo Jose Abatti, Seimei Sha

Research output: Contribution to journalArticlepeer-review


A rhythmic, sustained, stable oscillation was reproducibly observed for a lipid membrane supported by a micropore of a thin membrane tip micropipet (TM pipet). The construction of the TM pipet was accomplished by implementing a microfabrication method that allowed the transference of a Si3N4 film with a hole from the Si substrate to the glass tube tip. The main part of the fabrication method is the sealing process: a mix between thermal and amodic bonding. The TM pipet fabrication is described in detail with emphasis on the thermal-anodic bonding process. In addition, a general account of the new device's main features, including various applications, is given.

Original languageEnglish
Pages (from-to)203-212
Number of pages10
JournalApplied Biochemistry and Biotechnology
Issue number3
Publication statusPublished - 1993 Mar
Externally publishedYes

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Biochemistry
  • Applied Microbiology and Biotechnology
  • Molecular Biology


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