TY - GEN
T1 - MEMS-based pressure sensor with a superoleophobic membrane for measuring droplet vibration
AU - Nguyen, Thanh Vinh
AU - Takahashi, Hidetoshi
AU - Shimoyama, Isao
N1 - Funding Information:
The photolithography masks were made using the University of Tokyo VLSI Design and Education Center (VDEC)’s 8 inch EB writer F5112 + VD01 donated by ADVANTEST Corporation. This work was partially supported by JSPS KAKENHI Grant Number 25000010, the Hattori Hokokai Foundation and the Nakatani Foundation. .
Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - We report on a sensor design to measure the vibration of small droplets. The sensor consists of a piezoresistive cantilever and a chamber covered with a superoleophobic membrane. The vibration of a droplet on the membrane causes the pressure of the chamber to change. Since the cantilever is able to detect a pressure change of less than 0.1 Pa, the vibration of the droplet can be precisely measured by the cantilever. In comparison to previously developed MEMS-based force sensor to measure the droplet vibration, the current sensor design offers several benefits including: wide range of usable liquids, simple sensing scheme (only one sensor is required) and capability to be disposable. With these advantages, our method is believed to be useful in measuring viscosity of small droplet for point-of-care application.
AB - We report on a sensor design to measure the vibration of small droplets. The sensor consists of a piezoresistive cantilever and a chamber covered with a superoleophobic membrane. The vibration of a droplet on the membrane causes the pressure of the chamber to change. Since the cantilever is able to detect a pressure change of less than 0.1 Pa, the vibration of the droplet can be precisely measured by the cantilever. In comparison to previously developed MEMS-based force sensor to measure the droplet vibration, the current sensor design offers several benefits including: wide range of usable liquids, simple sensing scheme (only one sensor is required) and capability to be disposable. With these advantages, our method is believed to be useful in measuring viscosity of small droplet for point-of-care application.
KW - Droplet vibration
KW - MEMS
KW - Piezoresistive
KW - Pressure sensor
KW - Superoleophobic
UR - http://www.scopus.com/inward/record.url?scp=85029375822&partnerID=8YFLogxK
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U2 - 10.1109/TRANSDUCERS.2017.7994257
DO - 10.1109/TRANSDUCERS.2017.7994257
M3 - Conference contribution
AN - SCOPUS:85029375822
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1152
EP - 1155
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -