MEMS mirror with slot structures suitable for flexible-grid WSS

Keisuke Sorimoto, Hitoshi Kawashima, Masahiko Mori, Toshifumi Hasama, Hiroshi Ishikawa, Hiroyuki Tsuda, Hisato Uetsuka

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


We propose a microelectromechanical system (MEMS) mirror design, which is suitable for use in a flexible-grid wavelength selective switch (WSS). In the flexible grid operation with a conventional MEMS-based WSS, the diffraction loss at the inter-mirror gap regions caused a large ripple in the transmission spectra. On the other hand, the newly introduced slot structures in each mirror can reduce the ripples by intentionally attenuating the light on the mirrors to equalize the reflectance of the entire mirrors. We optimize the slot structure aiming for the flexible-grid WSS operation with a bandwidth-granularity of 12.5 GHz. The ripples are successfully reduced to below 0.004 dB with a loss penalty of only 1.05 dB.

Original languageEnglish
Article number20120924
JournalIEICE Electronics Express
Issue number3
Publication statusPublished - 2013


  • Flexible grid
  • Microelectromechanical system (MEMS)
  • Slot structure
  • Wavelength selective switch (WSS)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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