Mems tactile display with hydraulic displacement amplification mechanism

T. Ninomiya; K. Osawa; Y. Okayama; Y. Matsumoto; N. Miki

doi:10.1109/MEMSYS.2009.4805420

Mems tactile display with hydraulic displacement amplification mechanism

T. Ninomiya, K. Osawa, Y. Okayama, Y. Matsumoto, N. Miki

Research output: Contribution to journal › Conference article › peer-review

18 Citations (Scopus)

Abstract

Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 gim. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.

Original language	English
Article number	4805420
Pages (from-to)	467-470
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805420
Publication status	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2009.4805420

Cite this

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title = "Mems tactile display with hydraulic displacement amplification mechanism",

abstract = "Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 gim. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.",

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year = "2009",

doi = "10.1109/MEMSYS.2009.4805420",

language = "English",

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journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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T1 - Mems tactile display with hydraulic displacement amplification mechanism

AU - Ninomiya, T.

AU - Osawa, K.

AU - Okayama, Y.

AU - Matsumoto, Y.

AU - Miki, N.

PY - 2009

Y1 - 2009

N2 - Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 gim. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.

AB - Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 gim. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.

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EP - 470

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

ER -

Mems tactile display with hydraulic displacement amplification mechanism

Abstract

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