Metastable Ti1-xAlxN films with different Al content

A. Kimura, H. Hasegawa, K. Yamada, T. Suzuki

Research output: Contribution to journalArticlepeer-review

46 Citations (Scopus)


The maximum solubility of Al in the Bl-NaCl structure of Ti1-xAlxN films synthesized by the arc ion plating (AIP) method was studied by the X-ray diffraction method using nine kinds of Ti1-xAlx alloy targets with different Al content. Further, the drastic microstructural changes around critical range of Al content were observed by scanning electron microscopy. The resulting data was analyzed.

Original languageEnglish
Pages (from-to)601-602
Number of pages2
JournalJournal of Materials Science Letters
Issue number7
Publication statusPublished - 2000

ASJC Scopus subject areas

  • General Materials Science


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