Microstructure of diamond-like carbon films prepared by cathodic arc deposition

Ayako Kimura; Yasushi Azuma; Tetsuya Suzuki; Tomohiro Saito; Yuichi Ikuhara

doi:10.1016/S0925-9635(02)00046-8

Microstructure of diamond-like carbon films prepared by cathodic arc deposition

Ayako Kimura, Yasushi Azuma, Tetsuya Suzuki, Tomohiro Saito, Yuichi Ikuhara

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp³/sp² ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp³/sp² ratio, compared with those under vacuum, argon and methane circumstances.

Original language	English
Pages (from-to)	1436-1440
Number of pages	5
Journal	Diamond and Related Materials
Volume	11
Issue number	7
DOIs	https://doi.org/10.1016/S0925-9635(02)00046-8
Publication status	Published - 2002 Jul

Keywords

Amorphous carbon
Chemical bonding
Microstructure
Physical vapor deposition

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/S0925-9635(02)00046-8

Cite this

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title = "Microstructure of diamond-like carbon films prepared by cathodic arc deposition",

abstract = "Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp3/sp2 ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp3/sp2 ratio, compared with those under vacuum, argon and methane circumstances.",

keywords = "Amorphous carbon, Chemical bonding, Microstructure, Physical vapor deposition",

author = "Ayako Kimura and Yasushi Azuma and Tetsuya Suzuki and Tomohiro Saito and Yuichi Ikuhara",

note = "Funding Information: One of the authors (A. Kimura) gratefully acknowledgements the Sasakawa Scientific Research Grant of the Japan Science Society.",

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T1 - Microstructure of diamond-like carbon films prepared by cathodic arc deposition

AU - Kimura, Ayako

AU - Azuma, Yasushi

AU - Suzuki, Tetsuya

AU - Saito, Tomohiro

AU - Ikuhara, Yuichi

N1 - Funding Information: One of the authors (A. Kimura) gratefully acknowledgements the Sasakawa Scientific Research Grant of the Japan Science Society.

PY - 2002/7

Y1 - 2002/7

N2 - Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp3/sp2 ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp3/sp2 ratio, compared with those under vacuum, argon and methane circumstances.

AB - Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp3/sp2 ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp3/sp2 ratio, compared with those under vacuum, argon and methane circumstances.

KW - Amorphous carbon

KW - Chemical bonding

KW - Microstructure

KW - Physical vapor deposition

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EP - 1440

JO - Diamond and Related Materials

JF - Diamond and Related Materials

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ER -

Microstructure of diamond-like carbon films prepared by cathodic arc deposition

Abstract

Keywords

ASJC Scopus subject areas

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