Physics
Dielectrics
100%
Transport Theory
100%
Organic Material
100%
Excitation
50%
Steady State
50%
Spatial Distribution
50%
Gas Mixture
50%
Plasma Density
50%
Integrated Circuit
50%
Neutral Gas
50%
Permittivity
50%
Engineering
Dielectrics
100%
Interconnects
66%
Organic Material
66%
Excited State
33%
Gas Mixture
33%
Promising Candidate
33%
Spatial Distribution
33%
Integrated Circuit
33%
Etching Process
33%
Speed Operation
33%
Continuum Model
33%
Plasma Density
33%
Material Science
Capacitance
100%
Electrical Resistivity
75%
Dielectric Material
50%
Electronic Circuit
25%
Gas Mixture
25%
Permittivity
25%
Plasma Density
25%
Materials Property
25%
Keyphrases
Metal-dielectric
100%
Device Resistance
50%
Cu Metal
50%