Nano-scale Fracture Test for Local Interface Adhesion Strength Evaluation in LSI Interconnects

N. Shishido, H. Sugiyama, S. Kamiya, H. Sato, K. Koiwa, M. Nishida, M. Omiya, T. Nagasawa, T. Nokuo, T. Suzuki, T. Nakamura

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)766-767
Number of pages2
JournalMicroscopy and Microanalysis
Publication statusPublished - 2012 Jul

ASJC Scopus subject areas

  • Instrumentation

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