Nanocavity-based quantum-dot single-photon source on a SiN waveguide integrated by transfer printing

Silicon nitride (SiN) integrated photonics is a highly promising platform for photonic quantum information processing. However, the efficient generation of single photons remains a significant challenge. Epitaxial InAs/GaAs quantum dots (QDs) embedded in wavelength-scale nanocavities offer a promising solution as single-photon sources (SPSs), but their integration with SiN has not yet been demonstrated. In this work, we employed a photonic crystal (PhC) nanobeam cavity to realize a QD SPS on a SiN waveguide. We found that the second-order mode of a period-modulated PhC nanobeam cavity is located close to the waveguide mode in the momentum space and could present a way to efficiently couple photons from the QD SPS into the waveguide. We fabricated the SiN circuitry and QD SPSs separately and integrated the SPS onto the waveguide by transfer printing. We observed Purcell enhancement by the cavity and confirmed the coupling of single photons into the waveguide.