Nanofabrication of high throughput 30 nm hole 2D arrays by a simple visible laser ablation technique

In this paper, we demonstrate two-dimensional nanohole array substrates prepared using the visible laser ablation technique. We fabricated Au/polymer hybrid thin films where the Au nanoparticles were fixed onto the block copolymer substrate, which was used as the microphase-separated structure. The film was coated with a thin layer of poly(methyl acrylate), and was then irradiated with a nanosecond 532 nm pulsed laser light. The light excited the resonant plasmon absorption band of the Au nanoparticles. The nanoparticles underwent explosive vaporization via a superheated state, resulting in the formation of two-dimensional nanohole arrays on the film surface. The relevant mechanism aspects of the nanohole formation process and the relationship with laser fluence are presented.