Nanoscale surface patterning of diamond utilizing carbon diffusion reaction with a microstructured titanium mold

Jiwang Yan; Yuji Imoto

doi:10.1016/j.cirp.2018.04.067

Nanoscale surface patterning of diamond utilizing carbon diffusion reaction with a microstructured titanium mold

Jiwang Yan, Yuji Imoto

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A novel method was proposed for generating nanoscale surface patterns on single-crystal diamond by carbon diffusion with a microstructured titanium mold under controlled temperature and pressure. The depth, geometry, and surface integrity of the fabricated patterns were investigated by laser micro-Raman spectroscopy and white-light interferometry, and the titanium molds were analyzed by energy dispersive X-ray spectroscopy. The results showed that at specific temperatures and pressures, three-dimensional patterns with a depth of tens of nanometers and sloped/curved walls could be generated on a diamond surface after a few minutes, without causing any surface graphitization. The intensity profile and penetration depth of carbon atoms into the titanium were experimentally measured.

Original language	English
Pages (from-to)	181-184
Number of pages	4
Journal	CIRP Annals
Volume	67
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2018.04.067
Publication status	Published - 2018 Jan 1

Keywords

Diamond
Nanostructure
Surface integrity

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/j.cirp.2018.04.067

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title = "Nanoscale surface patterning of diamond utilizing carbon diffusion reaction with a microstructured titanium mold",

abstract = "A novel method was proposed for generating nanoscale surface patterns on single-crystal diamond by carbon diffusion with a microstructured titanium mold under controlled temperature and pressure. The depth, geometry, and surface integrity of the fabricated patterns were investigated by laser micro-Raman spectroscopy and white-light interferometry, and the titanium molds were analyzed by energy dispersive X-ray spectroscopy. The results showed that at specific temperatures and pressures, three-dimensional patterns with a depth of tens of nanometers and sloped/curved walls could be generated on a diamond surface after a few minutes, without causing any surface graphitization. The intensity profile and penetration depth of carbon atoms into the titanium were experimentally measured.",

keywords = "Diamond, Nanostructure, Surface integrity",

author = "Jiwang Yan and Yuji Imoto",

note = "Publisher Copyright: {\textcopyright} 2018",

year = "2018",

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doi = "10.1016/j.cirp.2018.04.067",

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AU - Yan, Jiwang

AU - Imoto, Yuji

PY - 2018/1/1

Y1 - 2018/1/1

N2 - A novel method was proposed for generating nanoscale surface patterns on single-crystal diamond by carbon diffusion with a microstructured titanium mold under controlled temperature and pressure. The depth, geometry, and surface integrity of the fabricated patterns were investigated by laser micro-Raman spectroscopy and white-light interferometry, and the titanium molds were analyzed by energy dispersive X-ray spectroscopy. The results showed that at specific temperatures and pressures, three-dimensional patterns with a depth of tens of nanometers and sloped/curved walls could be generated on a diamond surface after a few minutes, without causing any surface graphitization. The intensity profile and penetration depth of carbon atoms into the titanium were experimentally measured.

AB - A novel method was proposed for generating nanoscale surface patterns on single-crystal diamond by carbon diffusion with a microstructured titanium mold under controlled temperature and pressure. The depth, geometry, and surface integrity of the fabricated patterns were investigated by laser micro-Raman spectroscopy and white-light interferometry, and the titanium molds were analyzed by energy dispersive X-ray spectroscopy. The results showed that at specific temperatures and pressures, three-dimensional patterns with a depth of tens of nanometers and sloped/curved walls could be generated on a diamond surface after a few minutes, without causing any surface graphitization. The intensity profile and penetration depth of carbon atoms into the titanium were experimentally measured.

KW - Diamond

KW - Nanostructure

KW - Surface integrity

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Nanoscale surface patterning of diamond utilizing carbon diffusion reaction with a microstructured titanium mold

Abstract

Keywords

ASJC Scopus subject areas

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