Needle Type Pressure Sensor with Parylene Membrane and Silicone Oil Inside

Takuto Kishimoto, Hidetoshi Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study presents a pressure sensor that can measure the pressure inside the human body. In the medical field, many pressure sensors have been developed for therapeutic applications. However, these pressure sensors require the whole sensor body to be put into the inside of the patient via surgical operations so that the measurement physically burdens patients. Here, we propose a needle-type pressure sensor with a built-in piezoresistive cantilever. The proposed sensor has a needle part with a thin membrane on the tip and is filled with incompressible liquid inside. By ply inserting a needle part into a target, we can measure the body fluid pressure with minimal invasiveness. The resistance of the built-in piezoresistive cantilever varies according to the pressure change applied to the needle tip. Because the fabricated sensor responded to pseudo body pressure, it was suggested that the fabricated needle-type pressure sensor could detect pressure change inside the body.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages668-671
Number of pages4
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 2022 Jan 92022 Jan 13

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2022-January
ISSN (Print)1084-6999

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period22/1/922/1/13

Keywords

  • Needle-type medical pressure sensor
  • parylene deposition
  • piezoresistive cantilever

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Needle Type Pressure Sensor with Parylene Membrane and Silicone Oil Inside'. Together they form a unique fingerprint.

Cite this