TY - GEN
T1 - Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage
AU - Takamatsu, Hikaru
AU - Sugiura, Toshihiko
PY - 2005/12/1
Y1 - 2005/12/1
N2 - Application of electrostatic actuators to MEMS is expected. It is important to evaluate nonlinear properties caused by electrostatic forces which are dominant in MEMS. In this research a beam-type electrostatic actuator is modeled by a spring-mass system. Its dynamical characteristics were analytically and numerically investigated in terms of nonlinearity, bifurcation and stability. It was found that nonlinear resonance appears under DC and AC applied voltage, and it may be due to the forced vibration and also parametric resonance.
AB - Application of electrostatic actuators to MEMS is expected. It is important to evaluate nonlinear properties caused by electrostatic forces which are dominant in MEMS. In this research a beam-type electrostatic actuator is modeled by a spring-mass system. Its dynamical characteristics were analytically and numerically investigated in terms of nonlinearity, bifurcation and stability. It was found that nonlinear resonance appears under DC and AC applied voltage, and it may be due to the forced vibration and also parametric resonance.
UR - http://www.scopus.com/inward/record.url?scp=33749055504&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33749055504&partnerID=8YFLogxK
U2 - 10.1109/ICMENS.2005.89
DO - 10.1109/ICMENS.2005.89
M3 - Conference contribution
AN - SCOPUS:33749055504
SN - 0769523986
SN - 9780769523989
T3 - Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
SP - 423
EP - 424
BT - Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
T2 - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Y2 - 24 July 2006 through 27 July 2006
ER -