Novel optical viscosity sensor based on laser-induced capillary wave

A. Ebisui, Y. Taguchi, Y. Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)


In recent years, viscosity has been one of the most important thermophysical properties, and its new sensing applications in a noninvasive method with small sample volume are required in a broad field. For example, in the medical field, the viscosity of body fluid, such as blood, is an essential parameter for diagnosis. In the present study, we have developed a new miniaturized optical viscometer, namely MOVS (Micro Optical Viscosity Sensor), which is applicable to the noninvasive, high speed, small sample volume, in situ and in vivo measurement of a liquid sample in both medical and industrial fields based on laser-induced capillary wave (LiCW) technique. In our experimental setup, two excitation laser beams interfere on a liquid surface and generate the LiCW. By observing the behavior of the LiCW using a probing laser, which contains the surface information of the sample liquid, viscosity and surface tension can be obtained. In this paper, the fabrication of prototype MOVS chip using micro-electro mechanical systems (MEMS) technology for the first time and the discussion of the validity of the viscosity measurement are reported. Preliminary measurement using distilled water was demonstrated, and nanosecond order high speed damping oscillation was successfully observed.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems VII
ISBN (Print)9780819470621
Publication statusPublished - 2008
EventMOEMS and Miniaturized Systems VII - San Jose, CA, United States
Duration: 2008 Jan 222008 Jan 23

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherMOEMS and Miniaturized Systems VII
Country/TerritoryUnited States
CitySan Jose, CA


  • Measurement technique
  • Micro-fabrication
  • Optical sensing
  • Surface tension
  • Viscosity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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